Repeatability of 0.5 µm over a 500 mm travel range

For precise positioning tasks in precision fabrication and automation, PI (Physik Instrumente) now offers the M-417 stage with a repeatability of 0.5 µm over a 500 mm travel range.

The new positioning stage from PI for high precision with 500 mm Travel Range.
The new positioning stage from PI for high precision with 500 mm Travel Range.

The drive of the M-417 comprises an efficient ActiveDrive DC motor with integrated 24 V amplifier that acts on the ball screw. Thanks to this structure, the stage achieves a velocity of 100 mm/s and is at the same time designed for high duty cycles. The recirculating ball bearings allow for a very high guiding accuracy of 100 µrad over the entire travel range. An incremental, motor-shaft-mounted rotary encoder controls the position with a unidirectional repeatability of 0.5 µm. The M-417 stage is 120 mm wide and 56 mm high. Its stress-relieved aluminum base ensures the stage’s high stability.

Efficient Drive Principle: DC Motors with ActiveDrive
By eliminating power losses between the amplifier and motor, the ActiveDrive System achieves an increased efficiency. The motor is controlled via pulse-width-modulated (PWM) signals. The operating voltage is obtained with an amplifier integrated in the motor case. Costs are reduced and the setup is more compact, because no external linear amplifier is needed. In addition, noise radiation is eliminated, since amplifier and motor are mounted together in a single shielded case.

Assets:

  • High duty cycles and velocity to 100 mm/s
  • Low crosstalk, ±100 µrad over the entire travel range
  • Efficient ActiveDrive DC servo motor
  • Direction-sensing reference point switch
  • Design resolution to 0.5 µm
  • Min. incremental motion to 0.5 µm
  • Noncontact limit switches

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Further Information available at:
http://www.physikinstrumente.com/…

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